Canon DS-80 Micro Laser Interferometer
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[edit] Product Name
Canon DS-80 Micro Laser Interferometer
[edit] Manufacturer Part Number
DS-80
[edit] Product Date
circa February 2007
[edit] Product Image
[edit] Manufacturer Provided Specifications and Description
- Overview
High resolution 0.08nm, Non contact measurement.
- Features
- Ultra-high resolutions of 0.08nm with high-speed response
- Linearity of ±0.02% of full scale
- Microscopic object can be measured by small beam spot
- Two types of data acquisition board, standard version with 100kHz sampling, high-speed version with 500kHz sampling
External dimensions of Signal processing unit
Standard version ISA/PCI board unit (I/F box + PCI board)
High-speed version PCI board
- Specifications
| Sensor Head |
A-type |
B-type |
C-type |
| Measurement System |
Michelson interferometer | ||
| Light source |
Semiconductor Laser (wavelength 650 nm) | ||
| Measuring range |
± 50 µm | ||
| Working distance |
10 mm |
2.5 mm |
53 ± 0.5 mm |
| Laser spot diameter |
20 x 10 µm |
5 x 2.5 µm |
50 x 25 µm |
| Alignment tolerance |
± 0.5 degrees |
± 2.0 degrees |
± 0.3 degrees |
| Resolution |
max. 0.08 nm | ||
| Linearity |
less than ± 0.02 % of full scale | ||
| Response frequency | max. 500 kHz (at 0.1 µm p-por less) | ||
| Object surface |
Mirror reflection surface | ||
| Dimensions |
51 x 38 x 19 mm |
47 x 38 x 19 mm | 53.1 x 49.5 x 20 mm |
DSP board unit
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